5/5/2010	10:42:25 AM	Bypass valve closed
5/5/2010	10:42:26 AM	Main Vac valve closed
5/5/2010	10:42:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/5/2010	10:42:39 AM	Recipe started at 10:42 AM
5/5/2010	10:42:39 AM	H2 valve closed
5/5/2010	10:42:39 AM	BCl3 valve closed
5/5/2010	10:42:39 AM	PH3 valve closed
5/5/2010	10:42:39 AM	SiCl4 pre valve closed
5/5/2010	10:42:39 AM	SiCl4 post valve closed
5/5/2010	10:42:39 AM	Main Vac valve closed
5/5/2010	10:42:39 AM	Bypass valve closed
5/5/2010	10:42:39 AM	Bubbler valve closed
5/5/2010	10:42:39 AM	Helium valve opened
5/5/2010	10:42:39 AM	Helium MFC set to  500.000000
5/5/2010	10:42:39 AM	H2 MFC set to  0.000000
5/5/2010	10:42:39 AM	BCl3 MFC set to  0.000000
5/5/2010	10:42:39 AM	SiCl4 MFC set to  0.000000
5/5/2010	10:42:39 AM	Bypass solenoid MFC set to  0.000000
5/5/2010	10:42:40 AM	Tube furnace set to 0
5/5/2010	10:43:14 AM	Run aborted at 10:43 AM
5/5/2010	10:43:14 AM	Helium valve closed
5/5/2010	10:43:14 AM	H2 valve closed
5/5/2010	10:43:14 AM	BCl3 valve closed
5/5/2010	10:43:14 AM	PH3 valve closed
5/5/2010	10:43:14 AM	SiCl4 pre valve closed
5/5/2010	10:43:14 AM	SiCl4 post valve closed
5/5/2010	10:43:14 AM	Bypass valve closed
5/5/2010	10:43:14 AM	Main Vac valve closed
5/5/2010	10:43:14 AM	Bubbler valve closed
5/5/2010	10:43:14 AM	Helium MFC set to  0.000000
5/5/2010	10:43:14 AM	H2 MFC set to  0.000000
5/5/2010	10:43:14 AM	BCl3 MFC set to  0.000000
5/5/2010	10:43:14 AM	SiCl4 MFC set to  0.000000
5/5/2010	10:43:14 AM	Tube furnace set to 0
5/5/2010	10:43:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/5/2010	10:43:22 AM	Program exited cleanly
5/5/2010	10:53:33 AM	Program started normally
5/5/2010	10:53:33 AM	Helium valve closed
5/5/2010	10:53:33 AM	H2 valve closed
5/5/2010	10:53:33 AM	BCl3 valve closed
5/5/2010	10:53:33 AM	PH3 valve closed
5/5/2010	10:53:33 AM	SiCl4 pre valve closed
5/5/2010	10:53:33 AM	SiCl4 post valve closed
5/5/2010	10:53:33 AM	Main Vac valve closed
5/5/2010	10:53:33 AM	Bypass valve closed
5/5/2010	10:53:33 AM	Bubbler valve closed
5/5/2010	10:53:33 AM	Helium MFC set to  0.000000
5/5/2010	10:53:33 AM	H2 MFC set to  0.000000
5/5/2010	10:53:33 AM	BCl3 MFC set to  0.000000
5/5/2010	10:53:33 AM	SiCl4 MFC set to  0.000000
5/5/2010	10:53:33 AM	Bypass solenoid MFC set to  760.000000
5/5/2010	10:53:34 AM	Tube furnace set to 0
5/5/2010	10:53:38 AM	Bypass valve opened
5/5/2010	10:53:39 AM	Main Vac valve opened
5/5/2010	10:53:49 AM	Bypass valve closed
5/5/2010	10:53:49 AM	Main Vac valve closed
5/5/2010	10:53:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/5/2010	10:53:54 AM	Recipe started at 10:53 AM
5/5/2010	10:53:54 AM	H2 valve closed
5/5/2010	10:53:54 AM	BCl3 valve closed
5/5/2010	10:53:54 AM	PH3 valve closed
5/5/2010	10:53:54 AM	SiCl4 pre valve closed
5/5/2010	10:53:54 AM	SiCl4 post valve closed
5/5/2010	10:53:54 AM	Main Vac valve closed
5/5/2010	10:53:54 AM	Bypass valve closed
5/5/2010	10:53:54 AM	Bubbler valve closed
5/5/2010	10:53:54 AM	Helium valve opened
5/5/2010	10:53:54 AM	Helium MFC set to  500.000000
5/5/2010	10:53:54 AM	H2 MFC set to  0.000000
5/5/2010	10:53:54 AM	BCl3 MFC set to  0.000000
5/5/2010	10:53:54 AM	SiCl4 MFC set to  0.000000
5/5/2010	10:53:54 AM	Bypass solenoid MFC set to  0.000000
5/5/2010	10:53:54 AM	Tube furnace set to 0
5/5/2010	10:55:13 AM	Helium valve closed
5/5/2010	10:55:13 AM	H2 valve closed
5/5/2010	10:55:13 AM	BCl3 valve closed
5/5/2010	10:55:13 AM	PH3 valve closed
5/5/2010	10:55:13 AM	SiCl4 pre valve closed
5/5/2010	10:55:13 AM	SiCl4 post valve closed
5/5/2010	10:55:13 AM	Main Vac valve closed
5/5/2010	10:55:13 AM	Bypass valve closed
5/5/2010	10:55:13 AM	Bubbler valve closed
5/5/2010	10:55:13 AM	Helium MFC set to  0.000000
5/5/2010	10:55:13 AM	H2 MFC set to  0.000000
5/5/2010	10:55:13 AM	BCl3 MFC set to  0.000000
5/5/2010	10:55:13 AM	SiCl4 MFC set to  0.000000
5/5/2010	10:55:13 AM	Bypass solenoid MFC set to  0.000000
5/5/2010	10:55:13 AM	Tube furnace set to 0
5/5/2010	10:55:14 AM	Run finished at 10:55 AM
5/5/2010	10:55:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/5/2010	10:57:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/5/2010	10:57:42 AM	Recipe started at 10:57 AM
5/5/2010	10:57:42 AM	Helium valve closed
5/5/2010	10:57:42 AM	H2 valve closed
5/5/2010	10:57:42 AM	BCl3 valve closed
5/5/2010	10:57:42 AM	PH3 valve closed
5/5/2010	10:57:42 AM	SiCl4 pre valve closed
5/5/2010	10:57:42 AM	SiCl4 post valve closed
5/5/2010	10:57:42 AM	Main Vac valve closed
5/5/2010	10:57:42 AM	Bubbler valve closed
5/5/2010	10:57:42 AM	Bypass valve opened
5/5/2010	10:57:42 AM	Helium MFC set to  0.000000
5/5/2010	10:57:42 AM	H2 MFC set to  0.000000
5/5/2010	10:57:42 AM	BCl3 MFC set to  0.000000
5/5/2010	10:57:42 AM	SiCl4 MFC set to  0.000000
5/5/2010	10:57:42 AM	Bypass solenoid MFC set to  0.000000
5/5/2010	10:57:42 AM	Tube furnace set to 0
5/5/2010	10:57:54 AM	Run aborted at 10:57 AM
5/5/2010	10:57:54 AM	Helium valve closed
5/5/2010	10:57:54 AM	H2 valve closed
5/5/2010	10:57:54 AM	BCl3 valve closed
5/5/2010	10:57:54 AM	PH3 valve closed
5/5/2010	10:57:54 AM	SiCl4 pre valve closed
5/5/2010	10:57:54 AM	SiCl4 post valve closed
5/5/2010	10:57:54 AM	Bypass valve closed
5/5/2010	10:57:54 AM	Main Vac valve closed
5/5/2010	10:57:54 AM	Bubbler valve closed
5/5/2010	10:57:54 AM	Helium MFC set to  0.000000
5/5/2010	10:57:54 AM	H2 MFC set to  0.000000
5/5/2010	10:57:54 AM	BCl3 MFC set to  0.000000
5/5/2010	10:57:54 AM	SiCl4 MFC set to  0.000000
5/5/2010	10:57:54 AM	Tube furnace set to 0
5/5/2010	10:57:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/5/2010	10:58:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/5/2010	10:58:18 AM	Recipe started at 10:58 AM
5/5/2010	10:58:18 AM	Helium valve closed
5/5/2010	10:58:18 AM	H2 valve closed
5/5/2010	10:58:18 AM	BCl3 valve closed
5/5/2010	10:58:18 AM	PH3 valve closed
5/5/2010	10:58:18 AM	SiCl4 pre valve closed
5/5/2010	10:58:18 AM	SiCl4 post valve closed
5/5/2010	10:58:18 AM	Main Vac valve closed
5/5/2010	10:58:18 AM	Bubbler valve closed
5/5/2010	10:58:18 AM	Bypass valve opened
5/5/2010	10:58:18 AM	Helium MFC set to  0.000000
5/5/2010	10:58:18 AM	H2 MFC set to  0.000000
5/5/2010	10:58:18 AM	BCl3 MFC set to  0.000000
5/5/2010	10:58:18 AM	SiCl4 MFC set to  0.000000
5/5/2010	10:58:18 AM	Bypass solenoid MFC set to  0.000000
5/5/2010	10:58:18 AM	Tube furnace set to 0
5/5/2010	10:59:00 AM	Helium valve closed
5/5/2010	10:59:00 AM	H2 valve closed
5/5/2010	10:59:00 AM	BCl3 valve closed
5/5/2010	10:59:00 AM	PH3 valve closed
5/5/2010	10:59:00 AM	SiCl4 pre valve closed
5/5/2010	10:59:00 AM	SiCl4 post valve closed
5/5/2010	10:59:00 AM	Bubbler valve closed
5/5/2010	10:59:00 AM	Main Vac valve opened
5/5/2010	10:59:00 AM	Bypass valve opened
5/5/2010	10:59:00 AM	Helium MFC set to  0.000000
5/5/2010	10:59:00 AM	H2 MFC set to  0.000000
5/5/2010	10:59:00 AM	BCl3 MFC set to  0.000000
5/5/2010	10:59:00 AM	SiCl4 MFC set to  0.000000
5/5/2010	10:59:00 AM	Bypass solenoid MFC set to  0.000000
5/5/2010	10:59:00 AM	Tube furnace set to 0
5/5/2010	10:59:00 AM	Run finished at 10:59 AM
5/5/2010	10:59:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/5/2010	10:59:40 AM	Bypass valve closed
5/5/2010	10:59:42 AM	Main Vac valve closed
5/5/2010	10:59:49 AM	Bypass valve opened
5/5/2010	10:59:49 AM	Main Vac valve opened
5/5/2010	1:11:12 PM	Bypass valve closed
5/5/2010	1:11:13 PM	Main Vac valve closed
5/5/2010	1:11:26 PM	Main Vac valve opened
5/5/2010	1:11:27 PM	Bypass valve opened
5/5/2010	1:12:45 PM	Recipe started at 1:12 PM
5/5/2010	1:12:45 PM	Helium valve closed
5/5/2010	1:12:45 PM	BCl3 valve closed
5/5/2010	1:12:45 PM	PH3 valve closed
5/5/2010	1:12:45 PM	SiCl4 pre valve closed
5/5/2010	1:12:45 PM	SiCl4 post valve closed
5/5/2010	1:12:45 PM	Main Vac valve closed
5/5/2010	1:12:45 PM	Bypass valve closed
5/5/2010	1:12:45 PM	Bubbler valve closed
5/5/2010	1:12:45 PM	H2 valve opened
5/5/2010	1:12:45 PM	Helium MFC set to  0.000000
5/5/2010	1:12:45 PM	H2 MFC set to  500.000000
5/5/2010	1:12:45 PM	BCl3 MFC set to  0.000000
5/5/2010	1:12:45 PM	SiCl4 MFC set to  0.000000
5/5/2010	1:12:45 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	1:12:46 PM	Tube furnace set to 0
5/5/2010	1:14:09 PM	Helium valve closed
5/5/2010	1:14:09 PM	BCl3 valve closed
5/5/2010	1:14:09 PM	PH3 valve closed
5/5/2010	1:14:09 PM	SiCl4 pre valve closed
5/5/2010	1:14:09 PM	SiCl4 post valve closed
5/5/2010	1:14:09 PM	Main Vac valve closed
5/5/2010	1:14:09 PM	Bypass valve closed
5/5/2010	1:14:09 PM	H2 valve opened
5/5/2010	1:14:09 PM	Bubbler valve opened
5/5/2010	1:14:09 PM	Helium MFC set to  0.000000
5/5/2010	1:14:09 PM	H2 MFC set to  500.000000
5/5/2010	1:14:09 PM	BCl3 MFC set to  0.000000
5/5/2010	1:14:09 PM	SiCl4 MFC set to  0.000000
5/5/2010	1:14:09 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	1:14:09 PM	Tube furnace set to 1000
5/5/2010	1:34:09 PM	Helium valve closed
5/5/2010	1:34:09 PM	BCl3 valve closed
5/5/2010	1:34:09 PM	PH3 valve closed
5/5/2010	1:34:09 PM	Main Vac valve closed
5/5/2010	1:34:09 PM	Bypass valve closed
5/5/2010	1:34:09 PM	H2 valve opened
5/5/2010	1:34:09 PM	SiCl4 pre valve opened
5/5/2010	1:34:09 PM	SiCl4 post valve opened
5/5/2010	1:34:09 PM	Bubbler valve opened
5/5/2010	1:34:09 PM	Helium MFC set to  0.000000
5/5/2010	1:34:09 PM	H2 MFC set to  500.000000
5/5/2010	1:34:09 PM	BCl3 MFC set to  0.000000
5/5/2010	1:34:09 PM	SiCl4 MFC set to  325.000000
5/5/2010	1:34:09 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	1:34:09 PM	Tube furnace set to 1000
5/5/2010	2:02:53 PM	H2 valve closed
5/5/2010	2:02:53 PM	BCl3 valve closed
5/5/2010	2:02:53 PM	PH3 valve closed
5/5/2010	2:02:53 PM	SiCl4 pre valve closed
5/5/2010	2:02:53 PM	SiCl4 post valve closed
5/5/2010	2:02:53 PM	Main Vac valve closed
5/5/2010	2:02:53 PM	Bypass valve closed
5/5/2010	2:02:53 PM	Helium valve opened
5/5/2010	2:02:53 PM	Bubbler valve opened
5/5/2010	2:02:53 PM	Helium MFC set to  500.000000
5/5/2010	2:02:53 PM	H2 MFC set to  0.000000
5/5/2010	2:02:53 PM	BCl3 MFC set to  0.000000
5/5/2010	2:02:53 PM	SiCl4 MFC set to  0.000000
5/5/2010	2:02:53 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	2:02:54 PM	Tube furnace set to 0
5/5/2010	2:22:54 PM	Helium valve closed
5/5/2010	2:22:54 PM	H2 valve closed
5/5/2010	2:22:54 PM	BCl3 valve closed
5/5/2010	2:22:54 PM	PH3 valve closed
5/5/2010	2:22:54 PM	SiCl4 pre valve closed
5/5/2010	2:22:54 PM	SiCl4 post valve closed
5/5/2010	2:22:54 PM	Main Vac valve closed
5/5/2010	2:22:54 PM	Bypass valve closed
5/5/2010	2:22:54 PM	Bubbler valve closed
5/5/2010	2:22:54 PM	Helium MFC set to  0.000000
5/5/2010	2:22:54 PM	H2 MFC set to  0.000000
5/5/2010	2:22:54 PM	BCl3 MFC set to  0.000000
5/5/2010	2:22:54 PM	SiCl4 MFC set to  0.000000
5/5/2010	2:22:54 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	2:22:54 PM	Tube furnace set to 0
5/5/2010	2:22:54 PM	Run finished at 2:22 PM
5/5/2010	2:31:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/5/2010	2:31:16 PM	Recipe started at 2:31 PM
5/5/2010	2:31:16 PM	Helium valve closed
5/5/2010	2:31:16 PM	H2 valve closed
5/5/2010	2:31:16 PM	BCl3 valve closed
5/5/2010	2:31:16 PM	PH3 valve closed
5/5/2010	2:31:16 PM	SiCl4 pre valve closed
5/5/2010	2:31:16 PM	SiCl4 post valve closed
5/5/2010	2:31:16 PM	Main Vac valve closed
5/5/2010	2:31:16 PM	Bubbler valve closed
5/5/2010	2:31:16 PM	Bypass valve opened
5/5/2010	2:31:16 PM	Helium MFC set to  0.000000
5/5/2010	2:31:16 PM	H2 MFC set to  0.000000
5/5/2010	2:31:16 PM	BCl3 MFC set to  0.000000
5/5/2010	2:31:16 PM	SiCl4 MFC set to  0.000000
5/5/2010	2:31:16 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	2:31:16 PM	Tube furnace set to 0
5/5/2010	2:32:00 PM	Helium valve closed
5/5/2010	2:32:00 PM	H2 valve closed
5/5/2010	2:32:00 PM	BCl3 valve closed
5/5/2010	2:32:00 PM	PH3 valve closed
5/5/2010	2:32:00 PM	SiCl4 pre valve closed
5/5/2010	2:32:00 PM	SiCl4 post valve closed
5/5/2010	2:32:00 PM	Bubbler valve closed
5/5/2010	2:32:00 PM	Main Vac valve opened
5/5/2010	2:32:00 PM	Bypass valve opened
5/5/2010	2:32:00 PM	Helium MFC set to  0.000000
5/5/2010	2:32:00 PM	H2 MFC set to  0.000000
5/5/2010	2:32:00 PM	BCl3 MFC set to  0.000000
5/5/2010	2:32:00 PM	SiCl4 MFC set to  0.000000
5/5/2010	2:32:00 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	2:32:00 PM	Tube furnace set to 0
5/5/2010	2:32:00 PM	Run finished at 2:32 PM
5/5/2010	2:32:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/5/2010	2:47:10 PM	Bypass valve closed
5/5/2010	2:47:11 PM	Main Vac valve closed
5/5/2010	2:47:19 PM	Bypass valve opened
5/5/2010	2:47:19 PM	Main Vac valve opened
5/5/2010	2:47:32 PM	Helium MFC set to  500.000000
5/5/2010	2:47:34 PM	Helium valve opened
5/5/2010	2:48:14 PM	Helium valve closed
5/5/2010	2:52:03 PM	Helium valve opened
5/5/2010	2:54:16 PM	Helium valve closed
5/5/2010	2:55:31 PM	Bypass valve closed
5/5/2010	2:55:31 PM	Main Vac valve closed
5/5/2010	2:55:39 PM	Main Vac valve opened
5/5/2010	2:55:40 PM	Bypass valve opened
5/5/2010	3:01:35 PM	Recipe started at 3:01 PM
5/5/2010	3:01:35 PM	Helium valve closed
5/5/2010	3:01:35 PM	BCl3 valve closed
5/5/2010	3:01:35 PM	PH3 valve closed
5/5/2010	3:01:35 PM	SiCl4 pre valve closed
5/5/2010	3:01:35 PM	SiCl4 post valve closed
5/5/2010	3:01:35 PM	Main Vac valve closed
5/5/2010	3:01:35 PM	Bypass valve closed
5/5/2010	3:01:35 PM	Bubbler valve closed
5/5/2010	3:01:35 PM	H2 valve opened
5/5/2010	3:01:35 PM	Helium MFC set to  0.000000
5/5/2010	3:01:35 PM	H2 MFC set to  500.000000
5/5/2010	3:01:35 PM	BCl3 MFC set to  0.000000
5/5/2010	3:01:35 PM	SiCl4 MFC set to  0.000000
5/5/2010	3:01:35 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	3:01:35 PM	Tube furnace set to 0
5/5/2010	3:02:57 PM	Helium valve closed
5/5/2010	3:02:57 PM	BCl3 valve closed
5/5/2010	3:02:57 PM	PH3 valve closed
5/5/2010	3:02:57 PM	SiCl4 pre valve closed
5/5/2010	3:02:57 PM	SiCl4 post valve closed
5/5/2010	3:02:57 PM	Main Vac valve closed
5/5/2010	3:02:57 PM	Bypass valve closed
5/5/2010	3:02:57 PM	H2 valve opened
5/5/2010	3:02:57 PM	Bubbler valve opened
5/5/2010	3:02:57 PM	Helium MFC set to  0.000000
5/5/2010	3:02:57 PM	H2 MFC set to  500.000000
5/5/2010	3:02:57 PM	BCl3 MFC set to  0.000000
5/5/2010	3:02:57 PM	SiCl4 MFC set to  0.000000
5/5/2010	3:02:57 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	3:02:57 PM	Tube furnace set to 1000
5/5/2010	3:22:57 PM	Helium valve closed
5/5/2010	3:22:57 PM	BCl3 valve closed
5/5/2010	3:22:57 PM	PH3 valve closed
5/5/2010	3:22:57 PM	Main Vac valve closed
5/5/2010	3:22:57 PM	Bypass valve closed
5/5/2010	3:22:57 PM	H2 valve opened
5/5/2010	3:22:57 PM	SiCl4 pre valve opened
5/5/2010	3:22:57 PM	SiCl4 post valve opened
5/5/2010	3:22:57 PM	Bubbler valve opened
5/5/2010	3:22:57 PM	Helium MFC set to  0.000000
5/5/2010	3:22:57 PM	H2 MFC set to  500.000000
5/5/2010	3:22:57 PM	BCl3 MFC set to  0.000000
5/5/2010	3:22:57 PM	SiCl4 MFC set to  325.000000
5/5/2010	3:22:57 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	3:22:57 PM	Tube furnace set to 1000
5/5/2010	3:42:57 PM	H2 valve closed
5/5/2010	3:42:57 PM	BCl3 valve closed
5/5/2010	3:42:57 PM	PH3 valve closed
5/5/2010	3:42:57 PM	SiCl4 pre valve closed
5/5/2010	3:42:57 PM	SiCl4 post valve closed
5/5/2010	3:42:57 PM	Main Vac valve closed
5/5/2010	3:42:57 PM	Bypass valve closed
5/5/2010	3:42:57 PM	Helium valve opened
5/5/2010	3:42:57 PM	Bubbler valve opened
5/5/2010	3:42:57 PM	Helium MFC set to  500.000000
5/5/2010	3:42:57 PM	H2 MFC set to  0.000000
5/5/2010	3:42:57 PM	BCl3 MFC set to  0.000000
5/5/2010	3:42:57 PM	SiCl4 MFC set to  0.000000
5/5/2010	3:42:57 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	3:42:57 PM	Tube furnace set to 0
5/5/2010	4:02:57 PM	Helium valve closed
5/5/2010	4:02:57 PM	H2 valve closed
5/5/2010	4:02:57 PM	BCl3 valve closed
5/5/2010	4:02:57 PM	PH3 valve closed
5/5/2010	4:02:57 PM	SiCl4 pre valve closed
5/5/2010	4:02:57 PM	SiCl4 post valve closed
5/5/2010	4:02:57 PM	Main Vac valve closed
5/5/2010	4:02:57 PM	Bypass valve closed
5/5/2010	4:02:57 PM	Bubbler valve closed
5/5/2010	4:02:57 PM	Helium MFC set to  0.000000
5/5/2010	4:02:57 PM	H2 MFC set to  0.000000
5/5/2010	4:02:57 PM	BCl3 MFC set to  0.000000
5/5/2010	4:02:57 PM	SiCl4 MFC set to  0.000000
5/5/2010	4:02:57 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	4:02:57 PM	Tube furnace set to 0
5/5/2010	4:02:57 PM	Run finished at 4:02 PM
5/5/2010	4:19:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/5/2010	4:19:55 PM	Recipe started at 4:19 PM
5/5/2010	4:19:55 PM	H2 valve closed
5/5/2010	4:19:55 PM	BCl3 valve closed
5/5/2010	4:19:55 PM	PH3 valve closed
5/5/2010	4:19:55 PM	SiCl4 pre valve closed
5/5/2010	4:19:55 PM	SiCl4 post valve closed
5/5/2010	4:19:55 PM	Main Vac valve closed
5/5/2010	4:19:55 PM	Bypass valve closed
5/5/2010	4:19:55 PM	Bubbler valve closed
5/5/2010	4:19:55 PM	Helium valve opened
5/5/2010	4:19:55 PM	Helium MFC set to  500.000000
5/5/2010	4:19:55 PM	H2 MFC set to  0.000000
5/5/2010	4:19:55 PM	BCl3 MFC set to  0.000000
5/5/2010	4:19:55 PM	SiCl4 MFC set to  0.000000
5/5/2010	4:19:55 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	4:19:55 PM	Tube furnace set to 0
5/5/2010	4:19:57 PM	Helium valve closed
5/5/2010	4:19:57 PM	H2 valve closed
5/5/2010	4:19:57 PM	BCl3 valve closed
5/5/2010	4:19:57 PM	PH3 valve closed
5/5/2010	4:19:57 PM	SiCl4 pre valve closed
5/5/2010	4:19:57 PM	SiCl4 post valve closed
5/5/2010	4:19:57 PM	Main Vac valve closed
5/5/2010	4:19:57 PM	Bypass valve closed
5/5/2010	4:19:57 PM	Bubbler valve closed
5/5/2010	4:19:57 PM	Helium MFC set to  0.000000
5/5/2010	4:19:57 PM	H2 MFC set to  0.000000
5/5/2010	4:19:57 PM	BCl3 MFC set to  0.000000
5/5/2010	4:19:57 PM	SiCl4 MFC set to  0.000000
5/5/2010	4:19:57 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	4:19:57 PM	Tube furnace set to 0
5/5/2010	4:20:09 PM	Helium valve closed
5/5/2010	4:20:09 PM	H2 valve closed
5/5/2010	4:20:09 PM	BCl3 valve closed
5/5/2010	4:20:09 PM	PH3 valve closed
5/5/2010	4:20:09 PM	SiCl4 pre valve closed
5/5/2010	4:20:09 PM	SiCl4 post valve closed
5/5/2010	4:20:09 PM	Main Vac valve closed
5/5/2010	4:20:09 PM	Bubbler valve closed
5/5/2010	4:20:09 PM	Bypass valve opened
5/5/2010	4:20:09 PM	Helium MFC set to  0.000000
5/5/2010	4:20:09 PM	H2 MFC set to  0.000000
5/5/2010	4:20:09 PM	BCl3 MFC set to  0.000000
5/5/2010	4:20:09 PM	SiCl4 MFC set to  0.000000
5/5/2010	4:20:09 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	4:20:09 PM	Tube furnace set to 0
5/5/2010	4:20:52 PM	Helium valve closed
5/5/2010	4:20:52 PM	H2 valve closed
5/5/2010	4:20:52 PM	BCl3 valve closed
5/5/2010	4:20:52 PM	PH3 valve closed
5/5/2010	4:20:52 PM	SiCl4 pre valve closed
5/5/2010	4:20:52 PM	SiCl4 post valve closed
5/5/2010	4:20:52 PM	Bubbler valve closed
5/5/2010	4:20:52 PM	Main Vac valve opened
5/5/2010	4:20:52 PM	Bypass valve opened
5/5/2010	4:20:52 PM	Helium MFC set to  0.000000
5/5/2010	4:20:52 PM	H2 MFC set to  0.000000
5/5/2010	4:20:52 PM	BCl3 MFC set to  0.000000
5/5/2010	4:20:52 PM	SiCl4 MFC set to  0.000000
5/5/2010	4:20:52 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	4:20:52 PM	Tube furnace set to 0
5/5/2010	4:25:52 PM	H2 valve closed
5/5/2010	4:25:52 PM	BCl3 valve closed
5/5/2010	4:25:52 PM	PH3 valve closed
5/5/2010	4:25:52 PM	SiCl4 pre valve closed
5/5/2010	4:25:52 PM	SiCl4 post valve closed
5/5/2010	4:25:52 PM	Main Vac valve closed
5/5/2010	4:25:52 PM	Bypass valve closed
5/5/2010	4:25:52 PM	Bubbler valve closed
5/5/2010	4:25:52 PM	Helium valve opened
5/5/2010	4:25:52 PM	Helium MFC set to  500.000000
5/5/2010	4:25:52 PM	H2 MFC set to  0.000000
5/5/2010	4:25:52 PM	BCl3 MFC set to  0.000000
5/5/2010	4:25:52 PM	SiCl4 MFC set to  0.000000
5/5/2010	4:25:52 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	4:25:52 PM	Tube furnace set to 0
5/5/2010	4:27:12 PM	Helium valve closed
5/5/2010	4:27:12 PM	H2 valve closed
5/5/2010	4:27:12 PM	BCl3 valve closed
5/5/2010	4:27:12 PM	PH3 valve closed
5/5/2010	4:27:12 PM	SiCl4 pre valve closed
5/5/2010	4:27:12 PM	SiCl4 post valve closed
5/5/2010	4:27:12 PM	Main Vac valve closed
5/5/2010	4:27:12 PM	Bypass valve closed
5/5/2010	4:27:12 PM	Bubbler valve closed
5/5/2010	4:27:12 PM	Helium MFC set to  0.000000
5/5/2010	4:27:12 PM	H2 MFC set to  0.000000
5/5/2010	4:27:12 PM	BCl3 MFC set to  0.000000
5/5/2010	4:27:12 PM	SiCl4 MFC set to  0.000000
5/5/2010	4:27:12 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	4:27:13 PM	Tube furnace set to 0
5/5/2010	4:27:28 PM	Helium valve closed
5/5/2010	4:27:28 PM	H2 valve closed
5/5/2010	4:27:28 PM	BCl3 valve closed
5/5/2010	4:27:28 PM	PH3 valve closed
5/5/2010	4:27:28 PM	SiCl4 pre valve closed
5/5/2010	4:27:28 PM	SiCl4 post valve closed
5/5/2010	4:27:28 PM	Main Vac valve closed
5/5/2010	4:27:28 PM	Bubbler valve closed
5/5/2010	4:27:28 PM	Bypass valve opened
5/5/2010	4:27:28 PM	Helium MFC set to  0.000000
5/5/2010	4:27:28 PM	H2 MFC set to  0.000000
5/5/2010	4:27:28 PM	BCl3 MFC set to  0.000000
5/5/2010	4:27:28 PM	SiCl4 MFC set to  0.000000
5/5/2010	4:27:28 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	4:27:28 PM	Tube furnace set to 0
5/5/2010	4:27:57 PM	Helium valve closed
5/5/2010	4:27:57 PM	H2 valve closed
5/5/2010	4:27:57 PM	BCl3 valve closed
5/5/2010	4:27:57 PM	PH3 valve closed
5/5/2010	4:27:57 PM	SiCl4 pre valve closed
5/5/2010	4:27:57 PM	SiCl4 post valve closed
5/5/2010	4:27:57 PM	Bubbler valve closed
5/5/2010	4:27:57 PM	Main Vac valve opened
5/5/2010	4:27:57 PM	Bypass valve opened
5/5/2010	4:27:57 PM	Helium MFC set to  0.000000
5/5/2010	4:27:57 PM	H2 MFC set to  0.000000
5/5/2010	4:27:57 PM	BCl3 MFC set to  0.000000
5/5/2010	4:27:57 PM	SiCl4 MFC set to  0.000000
5/5/2010	4:27:57 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	4:27:57 PM	Tube furnace set to 0
5/5/2010	4:32:57 PM	H2 valve closed
5/5/2010	4:32:57 PM	BCl3 valve closed
5/5/2010	4:32:57 PM	PH3 valve closed
5/5/2010	4:32:57 PM	SiCl4 pre valve closed
5/5/2010	4:32:57 PM	SiCl4 post valve closed
5/5/2010	4:32:57 PM	Main Vac valve closed
5/5/2010	4:32:57 PM	Bypass valve closed
5/5/2010	4:32:57 PM	Bubbler valve closed
5/5/2010	4:32:57 PM	Helium valve opened
5/5/2010	4:32:57 PM	Helium MFC set to  500.000000
5/5/2010	4:32:57 PM	H2 MFC set to  0.000000
5/5/2010	4:32:57 PM	BCl3 MFC set to  0.000000
5/5/2010	4:32:57 PM	SiCl4 MFC set to  0.000000
5/5/2010	4:32:57 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	4:32:58 PM	Tube furnace set to 0
5/5/2010	4:34:17 PM	Helium valve closed
5/5/2010	4:34:17 PM	H2 valve closed
5/5/2010	4:34:17 PM	BCl3 valve closed
5/5/2010	4:34:17 PM	PH3 valve closed
5/5/2010	4:34:17 PM	SiCl4 pre valve closed
5/5/2010	4:34:17 PM	SiCl4 post valve closed
5/5/2010	4:34:17 PM	Main Vac valve closed
5/5/2010	4:34:17 PM	Bypass valve closed
5/5/2010	4:34:17 PM	Bubbler valve closed
5/5/2010	4:34:17 PM	Helium MFC set to  0.000000
5/5/2010	4:34:17 PM	H2 MFC set to  0.000000
5/5/2010	4:34:17 PM	BCl3 MFC set to  0.000000
5/5/2010	4:34:17 PM	SiCl4 MFC set to  0.000000
5/5/2010	4:34:17 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	4:34:17 PM	Tube furnace set to 0
5/5/2010	4:34:32 PM	Helium valve closed
5/5/2010	4:34:32 PM	H2 valve closed
5/5/2010	4:34:32 PM	BCl3 valve closed
5/5/2010	4:34:32 PM	PH3 valve closed
5/5/2010	4:34:32 PM	SiCl4 pre valve closed
5/5/2010	4:34:32 PM	SiCl4 post valve closed
5/5/2010	4:34:32 PM	Main Vac valve closed
5/5/2010	4:34:32 PM	Bubbler valve closed
5/5/2010	4:34:32 PM	Bypass valve opened
5/5/2010	4:34:32 PM	Helium MFC set to  0.000000
5/5/2010	4:34:32 PM	H2 MFC set to  0.000000
5/5/2010	4:34:32 PM	BCl3 MFC set to  0.000000
5/5/2010	4:34:32 PM	SiCl4 MFC set to  0.000000
5/5/2010	4:34:32 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	4:34:32 PM	Tube furnace set to 0
5/5/2010	4:35:02 PM	Helium valve closed
5/5/2010	4:35:02 PM	H2 valve closed
5/5/2010	4:35:02 PM	BCl3 valve closed
5/5/2010	4:35:02 PM	PH3 valve closed
5/5/2010	4:35:02 PM	SiCl4 pre valve closed
5/5/2010	4:35:02 PM	SiCl4 post valve closed
5/5/2010	4:35:02 PM	Bubbler valve closed
5/5/2010	4:35:02 PM	Main Vac valve opened
5/5/2010	4:35:02 PM	Bypass valve opened
5/5/2010	4:35:02 PM	Helium MFC set to  0.000000
5/5/2010	4:35:02 PM	H2 MFC set to  0.000000
5/5/2010	4:35:02 PM	BCl3 MFC set to  0.000000
5/5/2010	4:35:02 PM	SiCl4 MFC set to  0.000000
5/5/2010	4:35:02 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	4:35:02 PM	Tube furnace set to 0
5/5/2010	4:40:02 PM	Helium valve closed
5/5/2010	4:40:02 PM	H2 valve closed
5/5/2010	4:40:02 PM	BCl3 valve closed
5/5/2010	4:40:02 PM	PH3 valve closed
5/5/2010	4:40:02 PM	SiCl4 pre valve closed
5/5/2010	4:40:02 PM	SiCl4 post valve closed
5/5/2010	4:40:02 PM	Bubbler valve closed
5/5/2010	4:40:02 PM	Main Vac valve opened
5/5/2010	4:40:02 PM	Bypass valve opened
5/5/2010	4:40:02 PM	Helium MFC set to  0.000000
5/5/2010	4:40:02 PM	H2 MFC set to  0.000000
5/5/2010	4:40:02 PM	BCl3 MFC set to  0.000000
5/5/2010	4:40:02 PM	SiCl4 MFC set to  0.000000
5/5/2010	4:40:02 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	4:40:02 PM	Tube furnace set to 0
5/5/2010	4:40:03 PM	Run finished at 4:40 PM
5/5/2010	4:40:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/5/2010	4:42:15 PM	Recipe started at 4:42 PM
5/5/2010	4:42:15 PM	BCl3 valve closed
5/5/2010	4:42:15 PM	PH3 valve closed
5/5/2010	4:42:15 PM	SiCl4 pre valve closed
5/5/2010	4:42:15 PM	SiCl4 post valve closed
5/5/2010	4:42:15 PM	Main Vac valve closed
5/5/2010	4:42:15 PM	Bypass valve closed
5/5/2010	4:42:15 PM	Bubbler valve closed
5/5/2010	4:42:15 PM	Helium valve opened
5/5/2010	4:42:15 PM	H2 valve opened
5/5/2010	4:42:15 PM	Helium MFC set to  475.000000
5/5/2010	4:42:15 PM	H2 MFC set to  25.000000
5/5/2010	4:42:15 PM	BCl3 MFC set to  0.000000
5/5/2010	4:42:15 PM	SiCl4 MFC set to  0.000000
5/5/2010	4:42:15 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	4:42:15 PM	Tube furnace set to 200
5/5/2010	4:43:35 PM	BCl3 valve closed
5/5/2010	4:43:35 PM	PH3 valve closed
5/5/2010	4:43:35 PM	SiCl4 pre valve closed
5/5/2010	4:43:35 PM	SiCl4 post valve closed
5/5/2010	4:43:35 PM	Main Vac valve closed
5/5/2010	4:43:35 PM	Bypass valve closed
5/5/2010	4:43:35 PM	Helium valve opened
5/5/2010	4:43:35 PM	H2 valve opened
5/5/2010	4:43:35 PM	Bubbler valve opened
5/5/2010	4:43:35 PM	Helium MFC set to  475.000000
5/5/2010	4:43:35 PM	H2 MFC set to  25.000000
5/5/2010	4:43:35 PM	BCl3 MFC set to  0.000000
5/5/2010	4:43:35 PM	SiCl4 MFC set to  0.000000
5/5/2010	4:43:35 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	4:43:35 PM	Tube furnace set to 200
5/5/2010	5:13:35 PM	H2 valve closed
5/5/2010	5:13:35 PM	BCl3 valve closed
5/5/2010	5:13:35 PM	PH3 valve closed
5/5/2010	5:13:35 PM	SiCl4 pre valve closed
5/5/2010	5:13:35 PM	SiCl4 post valve closed
5/5/2010	5:13:35 PM	Main Vac valve closed
5/5/2010	5:13:35 PM	Bypass valve closed
5/5/2010	5:13:35 PM	Helium valve opened
5/5/2010	5:13:35 PM	Bubbler valve opened
5/5/2010	5:13:35 PM	Helium MFC set to  500.000000
5/5/2010	5:13:35 PM	H2 MFC set to  0.000000
5/5/2010	5:13:35 PM	BCl3 MFC set to  0.000000
5/5/2010	5:13:35 PM	SiCl4 MFC set to  0.000000
5/5/2010	5:13:35 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	5:13:35 PM	Tube furnace set to 0
5/5/2010	5:23:35 PM	Helium valve closed
5/5/2010	5:23:35 PM	H2 valve closed
5/5/2010	5:23:35 PM	BCl3 valve closed
5/5/2010	5:23:35 PM	PH3 valve closed
5/5/2010	5:23:35 PM	SiCl4 pre valve closed
5/5/2010	5:23:35 PM	SiCl4 post valve closed
5/5/2010	5:23:35 PM	Main Vac valve closed
5/5/2010	5:23:35 PM	Bypass valve closed
5/5/2010	5:23:35 PM	Bubbler valve closed
5/5/2010	5:23:35 PM	Helium MFC set to  0.000000
5/5/2010	5:23:35 PM	H2 MFC set to  0.000000
5/5/2010	5:23:35 PM	BCl3 MFC set to  0.000000
5/5/2010	5:23:35 PM	SiCl4 MFC set to  0.000000
5/5/2010	5:23:35 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	5:23:35 PM	Tube furnace set to 0
5/5/2010	5:23:35 PM	Run finished at 5:23 PM
5/5/2010	5:33:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/5/2010	5:33:19 PM	Recipe started at 5:33 PM
5/5/2010	5:33:19 PM	Helium valve closed
5/5/2010	5:33:19 PM	H2 valve closed
5/5/2010	5:33:19 PM	BCl3 valve closed
5/5/2010	5:33:19 PM	PH3 valve closed
5/5/2010	5:33:19 PM	SiCl4 pre valve closed
5/5/2010	5:33:19 PM	SiCl4 post valve closed
5/5/2010	5:33:19 PM	Main Vac valve closed
5/5/2010	5:33:19 PM	Bubbler valve closed
5/5/2010	5:33:19 PM	Bypass valve opened
5/5/2010	5:33:19 PM	Helium MFC set to  0.000000
5/5/2010	5:33:19 PM	H2 MFC set to  0.000000
5/5/2010	5:33:19 PM	BCl3 MFC set to  0.000000
5/5/2010	5:33:19 PM	SiCl4 MFC set to  0.000000
5/5/2010	5:33:19 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	5:33:19 PM	Tube furnace set to 0
5/5/2010	5:34:01 PM	Helium valve closed
5/5/2010	5:34:01 PM	H2 valve closed
5/5/2010	5:34:01 PM	BCl3 valve closed
5/5/2010	5:34:01 PM	PH3 valve closed
5/5/2010	5:34:01 PM	SiCl4 pre valve closed
5/5/2010	5:34:01 PM	SiCl4 post valve closed
5/5/2010	5:34:01 PM	Bubbler valve closed
5/5/2010	5:34:01 PM	Main Vac valve opened
5/5/2010	5:34:01 PM	Bypass valve opened
5/5/2010	5:34:01 PM	Helium MFC set to  0.000000
5/5/2010	5:34:01 PM	H2 MFC set to  0.000000
5/5/2010	5:34:01 PM	BCl3 MFC set to  0.000000
5/5/2010	5:34:01 PM	SiCl4 MFC set to  0.000000
5/5/2010	5:34:01 PM	Bypass solenoid MFC set to  0.000000
5/5/2010	5:34:01 PM	Tube furnace set to 0
5/5/2010	5:34:01 PM	Run finished at 5:34 PM
5/5/2010	5:34:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
